EarthQuake S-10 Operation manual Manuál s instrukcemi

INSTRUCTION MANUAL FOR MODEL S-4800 FIELD EMISSION SCANNING ELECTRON MICROSCOPE Please read through this manual carefully before using the instrum

SAFETY - 2SAFETY SUMMARY(cont’d) • Installation at delivery, maintenance and/or relocation must be carried out under the supervision of Hitachi-appro

2 - 382.3.6.7 SIGNAL PROCESSING block Applies real time digital image processing to the scanning image. (1) Processing selection box Selects

2 - 392.3.6.8 TILT COMPENSATION block Specimen tilting causes defocusing and magnification change to the tilt direction. Tilt compensation is t

2 - 40then a color composite image of yellow BSE and Blue SE is displayed. To return to standard image display mode, uncheck the COLOR MIXING box.

2 - 412.3.6.13 Arrangement of control blocks Above controls are placed on SEM and UTILITY tabs by user arrangement. Open the Operation Panel tab o

2 - 422.3.7 Mouse operation on the scanning image Mouse operation tools for adjusting focus, stigma, contrast, brightness and specimen stage are p

2 - 43Area Coarse focus adjustment : move mouse horizontally pressing down right button. Fine focus adjustment : move mouse horizontally pressing down

2 - 442.3.7.3 Stage and image shift tools Controls shown below will be shown on the scanning image. Type1 manual stage Type2 motorized stag

2 - 452.3.8.1 Column tab The Column tab is for setting operating condition of the electron optical column. (1) HIGH MAG MODE block Set column condit

2 - 46particularly in the central field of view at low magnifications. In such a case, use Low Mag mode for observation at low magnifications. Tur

2 - 472.3.8.2 Image tab The Image tab is for setting operating condition regarding to image observation. (1) PRESET MAGNIFICATION block Select or in

SAFETY - 3Electrical Hazard Electrical hazards exist due to the following: Electron Gun : 0.5 to 30 kV DC Ion Pump : 5 kV DC Photomultiplier

2 - 482.3.8.3 Record tab (1) AUTO DATA DISPLAY block (1-1) Auto Data Display Auto data display is engaged when this box is checked. (1-2) Magnificat

2 - 49 For 640×480 pixels image data →960 lines (16/19 s photographing time) For 1280×960 pixels image data →19200 lines (32/38 s pho

2 - 502.3.8.4 OP. Cond tab This function is provided for saving and loading conditions of the electron optical column. Save Load F

2 - 512.3.9 Captured Image Window Captured images are displayed as thumbnails on this window. It opens when you captured an image. Also it can be op

2 - 522.3.10 SEM Data Manager Window SEM Data Manager is an image-filing program with an easy-to-operate database function. Images are registered

2 - 532.3.12 CD Measurement dialog window (option) Refer to the operation manual of the function. 2.3.13 Comm Port Setting Dialog Window Set

2 - 542.3.15 Oblique Dialog Window The Oblique dialog window is used to display an oblique image. To open the dialog window, select the Oblique comm

2 - 552.3.17 Save Image Dialog Window The Save Image dialog window is used for saving scanning images or captured images. To save scanning image

2 - 562.3.20 Using Short-Cut Keys Short-cut keys are available for execution of many commands. (1) Using short-cut keys Input Alt + [underlined ch

3 - 13. OPERATION Shown below is the procedural flow of typical SEM operation. For details, refer to each subsection. 3.1 Preliminary Operation •

SAFETY - 4High Temperature Hazard Baking the electron gun part is carried out about once per 6 months to keep high vacuum inside the part. When ba

3 - 2 3.9 At the End of Daily Use 3.10 Using Other Functions 3.11 Image Quality • Turning High Voltage Off ...(

3 - 33.1 Preliminary Operation 3.1.1 Check of Column Vacuum At the beginning of SEM operation, check the evacuation control panel. The followin

3 - 43.1.2 Flow the cooling water S-4800 requires water flow for cooling the objective lens coil. It is necessary while the Display unit is power

3 - 5☼☼● ● : 1.8 L / minute ☼☼●☼ : 1.95 L / minute ← maximum value ☼☼☼☼: 2.25 L / minute or more (4) Warning message When water flow is over th

3 - 63.1.4 Use of Anti-Contamination Trap For image observation at high magnifications or low accelerating voltages, the use of the Anti-contami

3 - 73.2 Specimen Setting and Specimen Exchange 3.2.1 Cautions on Specimen Preparation During specimen preparation, observe the followings.

3 - 83.2.3 Adjustment of Specimen Height Put the specimen stub on the specimen holder and adjust it to the proper height using the specimen height

3 - 9(2) Type II (5-axis motorized stage): Click the EXC button on the control panel. The stage is then moved to the specimen exchange position, and

3 - 10(2) Turn the knob of the specimen exchange rod clockwise so as the Unlock mark comes upwards. Insert the rod straigh

3 - 113.2.5.2 Opening the specimen exchange chamber door When a specimen is not set inside the chamber and the specimen exchange chamber has b

SAFETY - 5Laser light Hazard The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Personal Computer with a laser devic

3 - 123.3 Application of High Voltage 3.3.1 Condition where the gun high voltage is applicable You can apply high voltage when the HV display

3 - 13(3) Set Intensity to “2” and click Execute button. The emission current value caused by flashing will be displayed on the Ie part of the HV D

3 - 143.3.4 Application of High Voltage When the HV Display are is blinking with yellow and blue color, click the ON button on the control panel

3 - 153.4 Optimizing the Electron Beam 3.4.1 Selecting a Magnification Mode S-4800 provides two magnification modes, High Mag mode and Low Mag

3 - 16surface of the specimen. At a shorter WD, higher resolution is attainable. At a longer WD, a larger tilt angle and a greater depth of foc

3 - 17For detailed condition setting, lick the Setup button on the above OPE CONDITION block. The Column tab of the Setup dialog window will open. (Al

3 - 18select a number from the pull-down menu, click on the up and down button (0.1 step), or key in a number (0.5 to 2.0) followed by the Return key.

3 - 19brightness in the field of view. In such a case, decrease the size of the specimen, use a longer WD, or lower the accelerating voltage in ord

3 - 203.4.3 Column Alignment Operation For the best performance of the instrument, alignment of the electron optical column axis is necessary. Ge

3 - 21(1) Beam Alignment Beam Alignment is necessary in order to align the electron beam down the center of the electron optical column and through th

SAFETY - 6 Fig S-1 Warning labels on the Main unit (standard version)

3 - 22objective lens by clicking the DeGauss button in the Column tab. Precise Aperture Alignment is difficult at low magnifications of 10,000 times

3 - 23NOTICE: Complete Beam Alignment and Aperture Alignment before starting Low Mag Position mode. Low Mag Position adjustment is necessary for each

3 - 243.5 Operation for Image Observation Follow the operation below for observation of a scanning image. 3.5.1 SE detector S-4800 has

3 - 25The signal intensity of the lower detector significantly decreases at short WD conditions. It is recommended to use the lower detector at a WD

3 - 26 General Characteristic of signals utilized in S-4800 Signal Characteristics Applications SE signal ･High resolution surface information ･

3 - 27The image formed with the upper detector is similar to of pure SE.(2) BSE-L Signal Detection When the +BSE button and one of L.A. (L.A.0 to L.A

3 - 283.5.2 Selecting Magnification There are several ways to select a magnification. (1) Dragging the mouse in the Magnification indication area

3 - 293.5.3 Selecting Scanning Speed Eight scanning speeds are available with four buttons. To select a scanning speed, click one of the Scan speed

3 - 30Slow1 and Slow are relatively fast slow scan. These two speeds are asynchronous to AC line frequency. It may cause some field magnetic disturba

3 - 313.5.4 Image Brightness and Contrast Adjustment Image brightness and contrast can be adjusted both manually and automatically. BC Monitor mo

SAFETY - 7Fig S-2 Warning labels on the Display unit (standard version) Pinch

3 - 32Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the Optional setup dialog window. Additionally, you can adjust t

3 - 33current; for example, during quantitative X-ray analysis using a probe current drift cancellation function, etc. When the Beam Monitor functio

3 - 343.5.5 Focus and Astigmatism Correction Focus and astigmatism correction can be done manually and automatically. Focus Monitor mode is avail

3 - 35little or no surface detail on the specimen, or when the specimen is charged, Auto Focus does not operate properly. (3) Manual Focus Manual

3 - 36 (6) Focus Monitor Mode A waveform is displayed for monitoring the focus. The magnification is set at 1,000×. To start the Focus Monitor, cl

3 - 373.5.6 Operation of the Specimen Stage (Type I - Manual Stage) The S-4800 type I SEM provides a 5-axis manual stage. 3.5.6.1 Movable range

3 - 383.5.6.3 Tilt and Z axes limitation The allowable tilting angle depends on both Z axis position and specimen size. Figure of relationship betwe

3 - 39 Important In case of φ15mm and φ25mm specimens, by applying limitation in X and Y directions written in page 3-40, the figure for 3 axes motor

3 - 40Relationship between minus tilting angle and Z position is the same as manual stage. Movable range of X and Y directions (3 axes motorized sta

3 - 413.5.7 Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage) The S-4800 type 2 SEM provides a 5-axis motorized stage 3.5.7.1 Co

SAFETY - 8（NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version) Fig S-3 Warning labels on the Main unit (ANSI style labels)

3 - 423.5.7.2 Movable range and specimen exchange position The following table shows movable range and specimen exchange position. Mechanical coordi

3 - 433.5.7.3 Setting specimen size and detectors in use The specimen size and height and optional detectors set at its operating position in the sp

3 - 44 3.5.7.4 Valious operation for specimen stage The following operation methods are available. (a) Operation on the Stage tab of the ope

3 - 453.5.7.5 Stage tab Basically use the Stage tab of the operation panel for stage operation. SPECIMEN blockSpeed sliderX / Y / R blockZ /

3 - 463.5.7.6 X, Y, R axes operation (1) Manual operation using trackball Stage moves to the direction of rotating trackball. Amount o

3 - 47(5) Position display The size of specimen, its present position and rotation angle are displayed on the XYR position monitor area. The white

3 - 48 NOTICE When the specimen height is set higher than the standard position, actual specimen surface position will be changed by tilting. The all

3 - 493.5.7.8 Stage mouse operation on the scanning image The mouse operation tools on the scanning image, for image adjustment (focus, stigma, cont

3 - 50(3) RISM function If the end point of the above operation is near the center of the image, the red line is changed to a yellow line and the end

3 - 51(5) R axis operation to a specified angle On the circle of the R axis tool, mouse pointer will be changed as shown below. Press down the left b

SAFETY - 9（NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version)Fig S-3 Warning labels on the Display unit (ANSI style labels)

3 - 52(7) Z axis operation to a specified coordinate On the circle of the Z axis tool, mouse pointer will be changed as shown below.

3 - 53(9) Tilt axis operation to a specified coordinate On the circle of the Tilt axis tool, mouse pointer will be changed as shown below.

3 - 54(11) Rotation adjust tool The rotation adjust tool is convenient for adjusting a line in image to horizontal. Move the mouse at about th

3 - 553.5.7.9 Position memory function The stage coordinates, both absolute and relative, can be memorized and retrieved. 200 absolute coordinates (

3 - 56(6) Moving the stage by relative movement To move the stage by a relative movement from the present position, select a page Rel and click Go.

3 - 57Click Go button to go to the position represented the selected point. (4) Deleting registered points To delete points individually, select the

3 - 58use any one selecting with << and >> button. By clicking a point on the navigation image, coordinate of the specified point is c

3 - 59the center of image and then, click the 1st button. (3-3) Find the first alignment point in the navigation image and click it. The next messag

3 - 60 Stage movable area5 inches sample(-35､-55) (75,-55)(-35,55) (75,55)(0,0)(-35,0)(-62.5,0)(62.5,0)(0,62.5)(0,-62.5)XY(-34

3 - 61be shown. (a) When the present position is 2mm or less near to the X or Y limit OK rotates the stage and move X and

SAFETY - 10 WARNING Beware of electric shock • Voltages up to 100 V AC and 30 kV DC are used inside this instrument. Do not touch inside or you

3 - 62 The above (a) and (b) are basically dependent on in assembling error of the instrument. These are measured and corrected once in the begi

3 - 631. [Rotation Center]: A mask holder specimen cannot be used. 2. [Tilt Center]: A BSE detector must be pulled out. 3. [Z Axis Comp.]:

3 - 64 As described in the message, bring the structure of interest to the image center at a magnification of about 500×, then click Enter button of

3 - 65(e) The specimen rotates to an angle of 90°. Again bring the point of interest to the center and click Enter button. (f) In the same way, ea

3 - 66 (a) Insert a specimen, set WD at 30 mm, tilt at 0° and R at 0°. Set the accelerating voltage to 5 kV or less, Probe current mode to Normal a

3 - 673.5.7.15 Stopping stage and Returning to previous stage position To stop stage movement while it is running, use the !STOP button on the C

3 - 683.5.7.16 Moveable range and limitation by optional detectors (1) Movable range of the specimen stage for various specimen size The movable r

3 - 69Possible to observeby rotation(0,17.5)（35,55)(0,92.5) （72.5,92.5)Area ofobservation75mmφφ75 specimen（72.5,17.5)(0,5)（35,55)(0,105)（85,105)Area o

3 - 700102030405060700 5 10 15 20 25 30 35 40Z (mm)T (deg) <φ15mm φ25mm φ50mm φ75mm φ100mm φ125mm φ150mm φ200mmFig 3-2 Allowable plus Tilting an

3 - 713.6 Saving and Recording Images 3.6.1 Saving and Recording Images It is possible to record images using conventional photo films and pri

SAFETY - 11 WARNING (cont’d) Laser Light The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Be sure to observe the fo

3 - 723.6.2 Preparing Images for Recording The source of image to be recorded is frozen image in the image memory except for direct photographing.

3 - 73(b) Data Entry When recording scanning images, graphics and texts written using Data Entry function are recorded as they are shown on the scanni

3 - 74• 5120x3840 Highest resolution. Effective for relatively low magnification and containing very fine structure. Note that the large image size

3 - 75The Captured Image window opens by Capture button on the tool bar section of the operation panel, Captured Image command in the Window menu and

3 - 76(4) Set options. The saved data is automatically registered to SEM Data Manager database when the SDM Register is checked. Graphics and texts

3 - 77(1) Setting Photo Condition To select the conditions for photo recording, open the Setup dialog window – Record tab by clicking the icon on th

3 - 78[Photo Size] Select a size of film. The magnification value is adjusted internally according to the selected size. ×0.6: For Type 120 Negativ

3 - 793.7 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is establ

3-803.8 At the End of Daily Use 3.8.1 Turning High Voltage Off (1) Close opening dialog windows. Save data if necessary (2) Click the HV OFF b

3-81Turn the knob counterclockwise so as the Lock mark comes upwards to hook on the specimen holder. Looking in the ch

NOTICE: 1. Information contained in this document is subject to change without notice for improvement. 2. This manual is copyrighte

SAFETY - 12Other Relevant Precautions • Water Leakage Detection A water-leakage detector is not provided with this equipment. Water leakage may be

3-823.8.4 Closing Windows and Shutting the Display Power At the end of daily use, shutdown the display power after closing Windows. (1) Click

3-833.9 Using Other Functions 3.9.1 Screen Mode Screen modes, Full, Dual or small are selectable with SCAN SIZE block of the operation panel.

3-84 (3) Dual screen display mode: Two 640×480 pixel images are shown simultaneously. These two images can be live or frozen independently, and can d

3-85(c) Capturing images The small indicators below the Capture button shows which screen is to be captured. You can change the indication by clicking

3-86The Split/Dual Mag controller is brought up and the scanning image area is divided in two. The magnification ratio of two images is selected w

3-87screen) image, and right side box for right side (B screen) image. Brightness and Contrast knobs on the manual operation panel is applied to the s

3-883.9.4 X-ray Analysis Mode Scanning modes for analysis are available in the Full and Small screen modes. Use the SCAN MODE block in the operation

3-89button and click the Direct Photo or Memory Photo button. Recommended procedures for taking a photograph is; ① Observe an image in Position

3-90specified area on the specimen. The Area Analysis button is used for two scanning modes as follows. (a) Position Set mode for Area Analysis Upon

3-91The following processing are available. (a) Smooth (1/2) Reduces snow noise. It is effective especially at high magnification, where originally im

SAFETY - 13Other Relevant Precautions (cont’d) • Third Party’s Application Programs Do not install a third party’s application programs into the PC o

3-92(b) Differential: Differential 1 and 2 are high-pass filters for the image signal. When applied, the image is differentiated in a horizontal direc

3-93(d) Save condition Click the Save button. The Condition Save dialog window will open. Input comment, specify a Condition name and then, click Save

3-943.9.7 Pseudo Color Display Use function of SEM Data Manager for pseudo Color imaging. 3.9.8 Data Entry Function Use the DATA ENTRY block on

3-95(d) Line Draw lines on the image. Click this button, and press the left button of the mouse to create the starting point of the line on the ima

3-96(q) Select buttons or button selects graphics or text on the image in order. A selected graphics is indicated with gray color and a surroun

3-973.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation (1) Raster Rotation Scanning of electron beam can be rotated within a range of -20

3-98screen. Adjust Dynamic Focus slider for the best focus. And use the following steps to use Tilt (magnification) compensation. (a) Set the Raster

3-993.9.11 Printing images using Report generation function The scanning image or saved image can be printed using a Windows-supported printer.

3-100 Photo Size button sets the default 4x5 inches photograph size. Or you can set any size desirable. (4) Adjusting lay

3-101 The result of adjustment is applied to the image on the sheet by OK button. (7) Print Set number of print on the Sett

SAFETY - 14Other Relevant Precautions (cont’d) (d) Power Saving mode Do not use the Power Saving mode. It will cause trouble for communication b

3-1023.9.14 Oblique Image An oblique (or birds-eye-view) image is formed from scanning image. To open the Oblique window, select the Oblique comma

3-1033.9.15 Optional setting Operation environments are set on the Optional Setup dialog window. To open the Optional Setup dialog window, selec

3-104(2) Operation Panel tab The arrangement of control blocks to be placed on the operation panel can be customized. (3) Tool bar Setting tab Sel

3-1053.9.16 Password Setting Use the Password Setting dialog window for setting or changing the password of the login name for current user. To ope

3-106Option menu. (3) Select the “S-4800” in the Login Name list. Set a password for the name. Input Old Password, if already set, and input new pas

3-1073.10 Image Quality The followings are references for getting better image quality. 3.10.1 Accelerating Voltage and Image Quality There is

3-1083.10.2 Condenser Lens Setting and Image Quality Probe current is adjusted by changing the Cond Lens 1 value. To increase probe current, sele

3-1093.11 Mechanical Column Alignment For normal operation, mechanical alignment of the electron gun and condenser lens is not necessary. If, howev

3-110(5) Set the Z axis of the stage at 8 mm and set the WD at 8 mm in the Column Tab. (6) Set the lowest magnification in High Mag Mode. (7)

3-1113.11.4 Alignment of the Objective Lens Aperture (1) In the Beam Align mode, set the objective lens aperture at 2 or 3. Aperture diameter is

SAFETY - 15 Emergency Off Button The Emergency Off button (EMO) is a red, mushroom shaped pushbutton switche, that is located on the Evacuation cont

3-112(5) Click the DeGauss button in the Column tab and adjust focus again. (6) Click the Aperture Align button in the Alignment dialog window,

3-113After completing column alignment, the indicator beside the Beam Monit button may blink in red color. If it is, click the button. The indication

3-1143.12 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is establis

3-1153.12.2 Functions 3.12.2.1 Image Database The top part of SEM Data Manager window when opened is as follows. Selection items

3-116▪ signal, Keywords : Put when saving. ▪ Sample ▪ Keyword1 / 2 ▪ Media 3.12.2.2 Menu and tool buttons The following picture shows an example

3-117Remove the image from database. Image file do not erased. ▪ Delete Delete the image. Image file is erased. ▪ Rename Rename the image file.Sav

3-118Enable or disable image enlargement by clicking on the image. Mouse pointer is the mark when it is enabled. ▪ Show thumbnail Shoe or hide

3-119▪ Data Entry（ ） Draw shapes and characters on the image. ▪ CD Measurement（） Open CD Measurement dialog window (Optional function) (6) Tool men

3-120(2) Registering images stored on disks To register already saved images to the SEM Data Manager database, use Add from File command in Database m

3-121with mark. NOTICE When you changed one of selection item, the data tree will be closed. Open the tree again. To make a new user name, Use

SAFETY - 16Main Power Disconnect Lock out/tag out procedure are very important safety concern. The purpose of the lock out/tag out procedure is

3-1223.12.3.4 Image information Information of the present selected image is shown on the image information area. You can edit Sample, Comment

3-123 (1) Function of tool buttons Function of tool buttons in the Data Entry toolbox is similar to the function on S-4800. (a) Edit text Edit alread

3-124and then releasing the mouse button. While this button is depressed, you can repeat drawing of a shape (k) Rectangle Draw rectangles on the imag

3-125The Clear button erases the selected data. To erase all, select all data by clicking button and then, click the Clear button. (5) Saving ima

3-126 → → (4) Contrast inversion The Negative button inverse black and white. (5) Gamma correction A Gamma value of larger than 1 enhance

3-127(a) Color Mode and Color Order • Off : No coloring • Color1 or Color2 : Convert gray scale value to RGB color as following figures. The L, M an

3-1283.12.3.8 Image Processing Digital image processing for noise reduction, increasing sharpness and detail enhancement are available. Open the Im

3-1293.12.3.9 Color Mixing Creates color composite image using two original images. It is applicable for color composition of two different signal i

3-130Select color for source images. Check Color and select R, G or B button. Select a mixing mode in the mixing selection box. • ADD : Add A and

3-1313.12.3.10 Printing images Use Layout Print command in File menu or Layout Print button on the tool bar. The Report Generation window will open

SAFETY - 17INTERLOCK Electron Gun The Gun cable is now interlocked with a momentary switch. If the cover at the top of the electron gun is remov

3-1323.12.3.12 Batch operation of image files Plural of image files can be operated at once. Use Batch Process command in Database menu or Batch

3-133down the button to the last selecting file, and then, release the button. Selected files are shown by reverse color. (b) Click the first selectin

3-1343.12.3.13 Slide show Use the Slide Show controller for viewing images in continuous slide motion. To open the Slide Show controller, use Slide

4-14. MAINTENANCE 4.1 Maintenance of Electron optical Column 4.1.1 Maintaining Vacuum of Electron Gun and Intermediate Chamber The elec

4-2(4) Disconnect two BNC type connectors from the objective lens aperture unit. Remove four screws fixing the flange of the unit. Pull off the unit s

4-3(13) Clean the aperture support and aperture holder by means of polishing paste, absorbent cotton (wound on a bamboo stick) and acetone. Cleanin

4-4(7) After completion of heating, wait for 10 to 15 minutes and introduce air into the vacuum evaporator. Then remove the aperture plate with twe

4-54.2 Maintenance of Rotary Pump （Only for P/N 539-9010 and 539-9060） NOTICE Instruments shipped to Europe area where CE marking conformity is

4-6(2) How to Inject Oil Inject oil through the oil injection port so that oil level reaches the center of the red circle in the oil gauge.

4-74.2.3 Troubleshooting Symptom Cause Countermeasure Power failure or voltage drop below 90 V. Check the power supply. Pump does not rotate at all

SAFETY - 18 Fig S- 6 Location of safety interlock

4-84.3 Maintenance of Air Compressor（Only for P/N 539-9010 and 539-9060） NOTICE Instruments shipped to Europe area where CE marking conformity is

4-9 NOTICE: 1. The mark “○” indicates the time period after start of operation or replacement of the part. The mark “●” shows the time point of

4-104.3.2 Troubleshooting of Air Compressor If the air compressor becomes faulty, reference should be made to the following table. Symptom Pr

4-114.3.3 Location and Functions of Major Components Drain cock Air tank Motor Push solenoid (single phase type only) Suction filterRemoves dust a

4-124.4 Troubleshooting 4.4.1 When Column Evacuation does not Work When the column evacuation system does not work, check the followings. (1)

4-13 (4) If you do not find any failure mentioned above, contact a service engineer. 4.4.3 When Specimen Chamber Vacuum is not Good If HV app

4-144.4.5 When Emission Current is not Set at Normal Value When emission current is not set at a normal value when you applied HV, check the

4-15 4.4.7 When Image is Very Noisy There may be three types of noise on scanning images. The first is a snow noise which appears uniformly on th

4-16 4.4.8 When You cannot Correct Astigmatism If astigmatism still remains at the maximum correction level (One (and/or both) of Stigma sliders

4-174.4.10 When S-4800 control program does not start up When the progress bar on the login dialog window does not progress to the end, or the lo

SAFETY - 19 Fig S- 7 Protection from movement during earthquakes (Display unit)

4-184.4.12 When Error Messages are shown Messages shown on the S-4800 GUI includes operation assist messages, warning for operation and messages

4-194.7 Operation for Starting S-4800 (1) Turn the MAIN switch in the power distribution panel of customers site to ON. (2) At the back of

4-20Set the APT HEATER switch to AUTO. (6) For ion pumps vacuum recovery, usually half to one day is necessary. (it is shorter when short period p

4-214.10 Gun Baking operation CAUTION Gun baking operation must be carried out by a service engineer or a person who has been trained by Hitachi

4-22(6) Mount the heater to the electron gun chamber. The heater consists of 2 parts. Fix them with the heater band. (7) Put two rods of inner

4-23(11) Starting gun baking on the S-4800 GUI You can start gun baking on the S-4800 GUI or on the evacuation control panel. NOTICE Before starting

4-24After selecting baking time, check items described in above (11). And then, press START button. In both case starting gun baking on the GUI or

4-254.11 Caution on Maintenance On maintenance of the instrument, the following cautions must be observed. (1) Follow the maintenance procedur

5 - 1 5. REPLACEMENT PARTS 5.1 Consumables and Spare Parts 5.1.1 Consumables The items shown in Table 5-1 should always be on hand for normal

5 - 2 5.1.2 Replacement Parts The items below should be prepared in the necessary quantities. Table 5-2 Replacement Parts Part No. Part Name

SAFETY - 20 Fig S- 8 Protection from movement during earthquakes (Main unit)

5 - 3 5.1.3 Spare Parts The items shown in Table 5-3 must be prepared for long-term operation. Select a proper quantity in consideration of the app

6.1.1 6 - 1 6. ACCESSORY OPERATION 6.1 Model S-5080 Auto-Camera (option) This camera is used for taking photographs of images displayed on the sc

6.1 Model S-5080 Auto-Camera (option) 6 - 2 type 4 x 5 single-exposure unit type 4 x 5 Polaroid unit 6 x 7 roll film unit (P/N 589-9871)

6.1.2 6 - 3 6.1.2 Specifications (1) Magnification : ×1.0, ×0.8, and ×0.6 (2) Lens : F = 75 mm (3) Aperture : f = 4.5 to 22, manual (4)

6.1 Model S-5080 Auto-Camera (option) 6 - 4

6.1.3 6 - 5 6.1.3 Assembling the Camera (1) Illustrated below are films for the standard PHOTO CRT. (a) type 4 x 5 film (magnification of 1.0)

6.1 Model S-5080 Auto-Camera (option) 6 - 6 6.1.4 Operation (1) Installing the Camera You should ask a service engineer for the installation. Ta

6.2 Installation Manual for the SEC Guide Rail (for Installer) 6 - 7 PHOTO CRT unit Camera Apertur

INDEX - 1INDEX A ABCC...2-22, 2-25, 2-27, 2-28, 2-32, 2-46, 2-47, 3-18,

INDEX - 2C Calibration... 2-24, 3-62~3-66 C

SAFETY - 21 Fig S- 9 Gravity location of Main unit (Type1)

INDEX - 3E Edit menu Copy Attribute command ...2-21, 3-101, 3-117 Copy Image c

INDEX - 4I Image Brightness... 2-22, 2-29, 3-31 Image

INDEX - 5O Oblique... 2-23, 2-54, 3-102

INDEX - 6S Save Image...2-21, 2-31, 2-51, 2-55, 3-75, 3-76, 3-119 Scan menu Capture

INDEX - 7T Tilt Compensation... 2-39, 3-97, 3-98 Toolba

FOREWORD - 1FOREWORD APPLICATION • The S-4800 SEM utilizes electron beam accelerated at 500 V to 30 kV. The instrument is designed mainly for obse

SAFETY - 22 Fig S- 10 Gravity location of Main unit (Type2)

SAFETY - 23 Fig S- 11 Gravity location of Display unit (Not include monitor display)

SAFETY - 24Fig S- 12 An example of the water-leakage detector

PRECAUTION - 1 PRECAUTIONS ON HANDLING For the sake of safety, the following points should be taken into consideration. 1. PRECAUTIONS FOR TRANSPOR

PRECAUTION - 2 CAUTION (1) Never touch the electron gun with bare hands in the course of baking and cooling. High temperature during baking may

PRECAUTION - 3 (1) Allow an interval of at least 20 seconds between turning on or off the EVAC POWER and DISPLAY POWER switches. (2) Replace the

PRECAUTION - 4 5. CAUTIONS ON OPERATION (1) During operation, occasionally confirm that the ion pumps are in a stable state. IP-1 2 × 10-7 Pa or

PRECAUTION - 5 7. FLASHING (1) Principle of Field Emission Electron Gun Figure 1 shows the principle of the field emission electron gun. The g

PRECAUTION - 6 Fig. 3 Status Transition of Adsorbed Gas Molecules on Cathode Tip A : In the initial reduction period, or just after flash

PRECAUTION - 7 (3) Flashing Procedure (a) Check and set up intensity of flashing as follows: Click the HV display area on the control panel. The H

FOREWORD - 2Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper opera

PRECAUTION - 8 SPECIFICATION Specifications for Hitachi Model S-4800, Field Emission Scanning Electron Microscope 1. Resolution: Accelerating volt

PRECAUTION - 9 4. Specimen Stage Motion Model S-4800, Type I Model S-4800, Type II X Traverse 0 to 50 mm (continuous) 0 to 110 mm (continuous)

PRECAUTION - 10 (6) Signal processing modes ...Automatic brightness control, Gamma control, Automatic focus, Automatic stigmator (

PRECAUTION - 11 INSTALLATION CONDITIONS 1. Power Requirements 100 V AC (±10%), single phase, 50/60 Hz, 4 kVA In case to use other voltage than 100V

PRECAUTION - 12 (4) Floor vibration S-4800 Type I S-4800 Type II The allowable amplitude corresponds to an image deviation

PRECAUTION - 13 4. Water Supply and Drain (1) Water flow rate ... 1 to 1.5 L/min (2) Water pressure...

- i - MODEL S-4800 FIELD EMISSION SCANNING ELECTRON MICROSCOPE Table of Contents FOREWORD...

- ii - Table of Contents (Cont’d) PRECAUTIONS ON HANDLING ...PRECAUTION-1 1. Pre

- iii - Table of Contents (Cont’d) 2. FUNCTIONS...

- iv - Table of Contents (Cont’d) 3.3 Application of High Voltage ...

FOREWORD - 3 GUARANTEE Period of Guarantee The charge-free guarantee period is one year from the date of installation. Details of Guarantee

- v - Table of Contents (Cont’d) 3.9.8 Data Entry Function... 3-94 3.9

- vi - Table of Contents (Cont’d) 4.4 Troubleshooting...

1-1 1. INSTALLATION Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work

1-2 1.1.3 Line Power Requirement (1) Single-phase AC, 4 kVA, 50/60 Hz. When the supplied power line voltage is 100V, the instrument works by dire

1-3 1.1.6 Stray Magnetic Field You should measure the stray magnetic field at the place for installing the Model S-4700 in advance. When the requ

1-4 remains unaffected so far as the field strength is within a few ten µT. 8. The allowable values given in Table 1-1 are applicable at the specifi

1-5 Figure 1-1 shows the relation between frequency of floor vibration and vibration transmittance of the instrument. Since the vibration transmitt

1-6 1.1.8 Power Line Noise and Electric Field Noise Image troubles may be observed when a device as given in Table 1-3 or its power line is instal

1-7 1.1.9 Disturbance by Sound Waves Sound waves (vibrations of air) adversely affect the Model S-4800 regardless of their frequency and may cause

1-8 Fig. 1-2 Installation Layout example 3400526(500)(800)∗1840 1000 (225)1100400225230(540)960(400)9663000RP WeightAi

FOREWORD - 4 GUARANTEE (i) Failure of instrument or damage of basic software, application software or other data due to a computer virus. (j) Fai

1-9 1.2 Materials or Instruments to be prepared by User See Table 1-4. Table 1-4 Materials or Instruments to be Prepared by User Name Quantit

1-10 1.3.1 Power and Ground Wirings The instrument operates only with a power supply of AC100 V. If using a power voltage other than AC100 V,

1-11 Use 8 square mm cable with M5 wire terminal. CAUTION Be sure that the output of the step down transformer is AC100V ±10%. Irregular connection

2 - 12. FUNCTIONS Fig. 2-1a and 2-1b show the appearance of the Model S-4800 type 1 and Type2. Main unit

2 - 22.1 Control Knobs and Switches on Main Unit 2.1.1 Main unit (Column) Fig. 2-2 shows the appearance of the S-4800 main unit (type I). Fi

2 - 3Fig. 2-3 sketches the sectional view of the S-4800 column. Fig. 2-3 Sectional View of S-4800 Column Beam monitor aperture Specimen goniomet

2 - 4Fig. 2-4 shows the Type 1 specimen stage. Fig. 2-4 Specimen Stage (type I) [X] control : Moves specimen in X direction within a rang

2 - 5Fig. 2-5 shows the appearance of large specimen stage driven by motors (type II). Fig. 2-5 Large Specimen Stage (type II) Range of movemen

2 - 6Fig. 2-6a and 2-6b show the specimen exchange device of Type 1 and type2 instruments. Specimen exchange Exchange chamber Viewing window

2 - 7Fig. 2-7 shows the block diagram of evacuating system. RPTMP BTSC:SpecimenchamberSEC:Specimenexchangechamber1stintermediateChamberElectron gunch

FOREWORD - 5 INSTALLATION AND AFTER-SALES SERVICE Installation • Installation at delivery will be carried out by Hitachi High-Technologies Corpor

2 - 8Fig. 2-8a shows the control panel for evacuation. Fig. 2-8a Evacuation Control Panel [EMERGENCY OFF] switch : Shuts down

2 - 9Fig. 2-8b shows the Display / Operation area. Fig. 2-8a Display / Operation area Vacuum of each chamber, status of evacuation seque

2 - 10The display status changes as the following table by depressing the MODE switch. Display status Status indicator lamp Numeric / character dis

2 - 11The following tables show alarm or error message and how to recover from the error. Errors with (*) mark are caused by failure on equipment.

2 - 12［Alarm according to gun baking］ Message No. description recovering operation E31(+ buzzer) HV cable head is not placed to t the cable holder pr

2 - 132.2 Control Knobs and Switches on Display Unit 2.2.1 Display Figure 2-9 shows the display unit. C980012 Fig. 2-9

2 - 14Fig. 2-10 shows the front panel of PC. Fig. 2-10 PC Panel • PC power switch : Power switch of PC. Usually the switch need not be used.

2 - 15[Focus] [Coarse] [Fine] knobs : Use for coarse and fine focus adjustment. • Magnification/Image shift control section [Magnification] knob :

2 - 162.3 Graphical User Interface (GUI) 2.3.1 Starting the PC and logging in the S-4800 program Use the following steps to log on to Window

2 - 17The S-4800 login dialog window will open. Fig. 2-15 S-4800 Loin dialog window At the first starting up after installation of the program,

FOREWORD - 6Available Training Programs Hitachi High-Technologies Corporation offers various kinds of training programs at its own facilities or at

2 - 182.3.2 S-4800 SEM Main Window The following is the main window for operation of the microscope. Fig. 2-16 S-4700 Operation Window

2 - 19Three modes of scanning image display are available, Full screen (shown on previous page), Small screen (Fig 2-17 left) and Dual screen (Fig 2-1

2 - 20(3) Menu bar Almost functions are executed on the menu bar. (4) Mouse operation on the scanning image The S button of mouse changes operation

2 - 212.3.4 Menu The menu bar and the toolbar include the following menus and commands. (1) File menu: The File menu includes commands for opening

2 - 22• Column Opens the Column tab of the Setup dialog window. Use it to select the optimal electron optical column. Refer to <3.4 Optimizing the

2 - 23(5) Scan menu: The Scan menu includes commands for scanning control. • Run (Freeze) Runs or Freezes scanning alternately. • Capture Starts i

2 - 24(8) Option menu: The Option menu includes commands for optional functions. • Optional Setup - Op. Panel Setting Opens Op. Panel tab of t

2 - 25(10) Help menu: Opens Help for S-4700 SEM operation. • Maintenance Opens the Maintenance dialog window. Use it for checking status of the Eva

2 - 262.3.5 Control Panel Most frequently used controls such that for Image observation, image recording. Usual operation will be able to perform

2 - 27When HV has been applied, click SET button after changing HV value. • Set Ie to button shows a pull down list of Ie (emission current) value

SAFETY - 1SAFETY SUMMARY General Safety Guidelines Before operating the machine, read the following instructions carefully: • Follow all the

2 - 282.3.5.3 Scan control block (1) Run button Run or freeze scanning. The button is when scanning and changed to while scan is frozen. To st

2 - 29little or no surface detail on the specimen, or when the specimen is charged, Auto Focus will not operate properly. 2.3.5.5 Monitoring functio

2 - 30Alternately, click the area with the right button to increase or with the left button to decrease magnification in a step. (2) Preset button

2 - 31 Direct Save : Opens the Save Image dialog window. Use it for saving viewing images to disk. (To save captured images, use the Save button in t

2 - 32button is green when the stage is at home position. (3) EXC button Move the stage to the position for specimen exchange (X=35, Y=0mm). The indi

2 - 33(4) Record A / B selection It selects which screen is to be recorded by Record functions. 2.3.6 Operation Panel Operation Panel has three

2 - 342.3.6.1 SIGNAL SELECT block (1) Signal select box Selects image signal for Full and Small screen mode and the A image of Dual screen m

2 - 352.3.6.2 OPE CONDITION block (1) Probe Current mode selection Select Normal for resolution prior application or High for application nee

2 - 362.3.6.3 R.ROTATION block Controls electron beam scanning direction to rotate image. To activate raster rotation, check the ON/OFF chec

2 - 372.3.6.5 SCAN SIZE block Selects a screen mode. (1) Full : Full screen mode Scanning image is displayed on full desktop. (2) Dual : Dual sc